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Seismic isolation and damping systems have been widely adopted since the 1980s as effective and economical measures for protecting civil structures, ...
Non-Destructive Measurement of Bottom Width in Deep Trench Isolation Structures using IRCD Metrology
As scaling in semiconductor devices continues, the aspect ratios of deep trench isolation (DTI) structures have increased. DTI structures are used in power devices, power management ICs and image ...
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