A focused ion beam scanning electron microscope (FIB-SEM) equipped with a compact time-of-flight secondary ion mass spectrometer (ToF-SIMS) 1,2 and traditional energy dispersive X-ray spectroscopy ...

Utilizing FIB-SEM, nanofluidic lab-on-a-chip devices for the analysis of single DNA molecules were characterized and fabricated. Direct FIB nanopatterning of silicon master stamps enables the quick ...

In this interview, we speak to Martin Slama at TESCAN, who describes sample preparation using high current plasma FIB SEM. Can you describe what high current plasma FIB-SEM is? The high current plasma ...

Figure 1.FIB-SEM cut through the layers of an MLCC electronic device. a) This high magnification view of a 10x20 μm area from the polished cross section appears to show a surface with minimal defects ...

When preparing cross sections, the standard procedure using the FIB-SEM technique is the use of high currents to quickly remove material, then lower the FIB current for an improved beam profile and ...